The CVD system consists of a gas supply system, a tube furnace, and an exhaust system. The maximum temperature can reach 1200 degrees, 1400 degrees, 1600 degrees, 1700 degrees, and the heating range can be single temperature zone, double temperature zone, triple temperature zone, etc. The ultimate vacuum can reach 10-3Pa. The gas supply system is flow regulated and can be a proton flowmeter or a float flowmeter. The number of mixing channels can be mixed with 2, 3, 4, or 5 channels.

This CVD system consists of a 4-way gas supply system KTL1600 tube furnace and a vacuum system.

(1) The hot end thickness D1 of silicon molybdenum rod is 7mm, which is commonly used by manufacturers as 6MM. The heating end is thick, not easy to bend, and the surface load of the rod is low, resulting in a long service life.

（2) It adopts hot bending technology, with uniform resistance and long service life

(3) Lu's cold end length is 210mm, and the 400X300X300 furnace has a length of 260. Generally, manufacturers use 180mm, and the long cold end has a low furnace top temperature.

(4) The surface of the silicon molybdenum rod has a dense amorphous oxide film, which can effectively protect the silicon molybdenum rod.

When the circuit experiences overcurrent or leakage, the circuit will automatically disconnect

This atmosphere tube furnaceapproveEquipped with communication interfaces and software, the various parameters of the furnace can be directly controlled through a computer, and the PV and SV temperature values and instrument operation on the furnace can be observed from the computer. The actual heating curve of the furnace will be drawn in real time by the computer, and the temperature data at each moment can be saved and retrieved at any time

(1) High quality high-purity alumina polycrystalline fiber solidification furnace formed by vacuum suction filtration.
(2) Adopting Japanese technology for molding.
(3) The furnace material has low heat capacity and low thermal conductivity, resulting in less heat dissipation, good insulation, and high reflectivity. Temperature field equilibrium.
(4) The furnace alumina wire is thin and long, with high temperature resistance and strong resistance to thermal expansion and contraction
(5) The furnace surface is smooth and not prone to powder loss.

(All imported electrical appliances certified by UL)

Adopting Yudian program temperature control instrument (standard)

1. 30 segment program temperature control intelligent PID regulation.

2. Equipped with over temperature protection and thermocouple breaking protection, the heating circuit of the electric furnace will automatically cut off in case of over temperature or thermocouple breaking (when the temperature of the electric furnace exceeds 1200 degrees or the thermocouple burns out, the AC relay on the main circuit will automatically disconnect, the main circuit will be disconnected, the ON light on the panel will turn off, and the OFF light will turn on, providing limited protection for the electric furnace).

3. Equipped with 485 communication interface (standard when selecting software)

4. It has a power-off protection function, which means that when the furnace is powered on after a power outage, the program does not start rising from the starting temperature, but from the furnace temperature when the power is cut off.

5. The instrument has the function of temperature self-tuning